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CAS No. 694-87-1

Benzocyclobutenone micro electro-mechanical systems (MEMS) are a type of microelectromechanical system that uses benzocyclobutenone as a material for the fabrication of MEMS devices. Benzocyclobutenone is a small molecule that has a unique combination of properties, including high thermal stability, low dielectric constant, and high mechanical strength. The use of benzocyclobutenone in MEMS devices has several advantages over other materials. For example, it can be used to fabricate devices with high aspect ratios, which are important for many MEMS applications. Additionally, benzocyclobutenone is compatible with a wide range of fabrication processes, including photolithography, etching, and deposition. Benzocyclobutenone MEMS devices have been used in a variety of applications

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